composite substrate造句
例句與造句
- Using the microwave selective heating property for materials , by setup equivalent equation , and first time inducing the electromagnetic field perturbation theory to the design of heating materials for substrate in mpcvd , three temperature distribution modes were established , including temperature distribution comprehensive mode of inhomogeneous plasma , temperature distribution composite mode of composite substrate materials , temperature distribution perturbation mode of composite materials , which ii provided an whole new technology route to the design of substrate heating system in mpcvd and guided the preparation of heating materials for substrate . and then the heating materials for substrate were designed and optimized to obtain large area homogeneous temperature distribution even larger than substrate holder ' s diameter . as an important part , this thesis researched the nucleation and growth of diamond films in mpcvd , systematically researched the effects of substrate pretreatment , methane concentration , deposition pressure and substrate temperature etc experimental technologic parameters on diamond films " quality on ( 100 ) single crystal silicon substrate in the process of mpcvd , characterized the films qualities in laser raman spectra ( raman ) , x - ray diffraction ( xrd ) , scanning electron microscopy ( sem ) , infrared transmission spectra ( ir ) , atomic force microscopy ( afm ) , determined the optimum parameters for mpcvd high quality diamond in the mpcvd - 4 mode system
該系統(tǒng)可通過沉積參數(shù)的精確控制,以控制沉積過程,減少金剛石膜生長過程中的缺陷,并采用光纖光譜儀檢測分析等離子體的可見光光譜以監(jiān)測微波等離體化學(xué)氣相沉積過程;利用微波對材料的選擇加熱特性,通過構(gòu)造等效方程,并首次將電磁場攝動理論引入到mpcvd的基片加熱材料的設(shè)計中,建立了非均勻等離子體溫度場綜合模型、復(fù)合介質(zhì)基片材料的復(fù)合溫度場模型及復(fù)合介質(zhì)材料溫度場攝動模型,為mpcvd的基片加熱系統(tǒng)設(shè)計提供了一條全新的技術(shù)路線以指導(dǎo)基片加熱材料的制備,并對基片加熱材料進(jìn)行了設(shè)計和優(yōu)選,以獲取大面積均勻的溫度場區(qū),甚至獲得大于基片臺尺寸的均勻溫度區(qū);作為研究重點之一,開展了微波等離體化學(xué)氣相沉積金剛石的成核與生長研究,系統(tǒng)地研究了在( 100 )單晶硅基片上mpcvd沉積金剛石膜的實驗過程中,基片預(yù)處理、甲烷濃度、沉積氣壓、基體溫度等不同實驗工藝參數(shù)對金剛石薄膜質(zhì)量的影響,分別用raman光譜、 x射線衍射( xrd ) 、掃描電鏡( sem ) 、紅外透射光譜( ir ) 、原子力顯微鏡( afm )對薄膜進(jìn)行了表征,確立了該系統(tǒng)上mpcvd金剛石膜的最佳的實驗工藝參數(shù)。 - It's difficult to find composite substrate in a sentence. 用composite substrate造句挺難的